Issued Patents All Time
Showing 51–75 of 118 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6881968 | Electron beam exposure apparatus, electron beam exposure method, semiconductor device manufacturing method, and electron beam shape measuring method | — | 2005-04-19 |
| 6869319 | Misconnection-proof key and connector using the same | Kazuyuki Ozai, Shinya Ishizuka, Kazuhiro Sato | 2005-03-22 |
| 6776637 | Panel mounted electrical connector movable relative to the panel | Kazuyuki Ozai, Hitoshi Kikuchi | 2004-08-17 |
| 6623441 | Blood-purifying apparatus and artificial kidney using the same | Kazuhiko Kihara | 2003-09-23 |
| 6579265 | Artificial kidney and an insertion guide used therein | Kazuhiko Kihara | 2003-06-17 |
| 6414325 | Charged particle beam exposure apparatus and exposure method capable of highly accurate exposure in the presence of partial unevenness on the surface of exposed specimen | Tatsuro Ohkawa | 2002-07-02 |
| 6361382 | Terminal assembly providing a space for inserting a cable | Takaharu Kouda, Manabu Hayakawa | 2002-03-26 |
| 6252344 | Electron gun used in an electron beam exposure apparatus | Yoshihisa Ooae, Takamasa Satoh, Hiroshi Yasuda | 2001-06-26 |
| 6222195 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Satoru Sagou, Hitoshi Watanabe, Satoru Yamazaki, Kiichi Sakamoto, Manabu Ohno +2 more | 2001-04-24 |
| 6175121 | Block mask and charged particle beam exposure method and apparatus using the same | Hiroshi Yasuda | 2001-01-16 |
| 6137111 | Charged particle-beam exposure device and charged-particle-beam exposure method | Satoru Sagou, Hitoshi Watanabe, Satoru Yamazaki, Kiichi Sakamoto, Manabu Ohno +2 more | 2000-10-24 |
| 6015975 | Method and apparatus for charged particle beam exposure | Kenichi Kawakami, Masahiko Susa, Kobayashi Katsuhiko, Koichi Yamashita, Naoki Nishio | 2000-01-18 |
| 5981960 | Charged particle beam exposure method and apparatus therefor | Yoshihisa Ooaeh, Hiroshi Yasuda, Hitoshi Tanaka | 1999-11-09 |
| 5965895 | Method of providing changed particle beam exposure in which representative aligning marks on an object are detected to calculate an actual position to perform exposure | Takamasa Satoh, Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Hisayasu Nishino +8 more | 1999-10-12 |
| 5949078 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Yoshihisa Ooaeh, Tomohiko Abe, Hiroshi Yasuda, Kenj Kudoh, Kouzi Takahata | 1999-09-07 |
| 5895924 | Charged particle beam exposure method and apparatus | Hiroshi Yasuda, Kazushi Ishida, Tohru Ikeda, Kouzi Takahata | 1999-04-20 |
| 5892237 | Charged particle beam exposure method and apparatus | Kenichi Kawakami, Hiroshi Yasuda, Tatsuro Ohkawa, Mitsuhiro Nakano, Atsushi Saito +1 more | 1999-04-06 |
| 5872366 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Yoshihisa Ooaeh, Tomohiko Abe, Hiroshi Yasuda, Kenj Kudoh, Kouzi Takahata | 1999-02-16 |
| 5854490 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Yoshihisa Ooaeh, Hiroshi Yasuda | 1998-12-29 |
| 5849436 | Block mask and charged particle beam exposure method and apparatus using the same | Hiroshi Yasuda | 1998-12-15 |
| 5841145 | Method of and system for exposing pattern on object by charged particle beam | Takamasa Satoh, Yoshihisa Oae, Soichiro Arai, Kenichi Miyazawa, Hiroshi Yasuda +5 more | 1998-11-24 |
| 5830612 | Method of detecting a deficiency in a charged-particle-beam exposure mask | Satoru Sagou, Hitoshi Watanabe, Satoru Yamazaki, Kiichi Sakamoto, Manabu Ohno +2 more | 1998-11-03 |
| 5808313 | Charged particle beam exposure method and charged particle beam exposure apparatus | Hiroshi Yasuda, Hidefumi Yabara, Atsushi Saito | 1998-09-15 |
| 5721432 | Method of and system for charged particle beam exposure | Takamasa Satoh, Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Hisayasu Nishino +8 more | 1998-02-24 |
| 5719402 | Method of and system for charged particle beam exposure | Takamasa Satoh, Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Hisayasu Nishino +8 more | 1998-02-17 |