Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5965895 | Method of providing changed particle beam exposure in which representative aligning marks on an object are detected to calculate an actual position to perform exposure | Takamasa Satoh, Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Kiichi Sakamoto +8 more | 1999-10-12 |
| 5721432 | Method of and system for charged particle beam exposure | Takamasa Satoh, Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Kiichi Sakamoto +8 more | 1998-02-24 |
| 5719402 | Method of and system for charged particle beam exposure | Takamasa Satoh, Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Kiichi Sakamoto +8 more | 1998-02-17 |
| 5546319 | Method of and system for charged particle beam exposure | Takamasa Satoh, Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Kiichi Sakamoto +8 more | 1996-08-13 |
| 5404018 | Method of and an apparatus for charged particle beam exposure | Hiroshi Yasuda, Yoshihisa Oae, Akio Yamada, Nobuyuki Yasutake | 1995-04-04 |
| 5399872 | Charged-particle beam exposure method | Hiroshi Yasuda, Junichi Kai, Soichiro Arai, Yoshihisa Oae | 1995-03-21 |
| 5382800 | Charged particle beam exposure method and apparatus | Akio Yamada, Yoshihisa Oae, Hiroshi Yasuda | 1995-01-17 |
| 5338939 | Charged particle beam exposure including a heat blocking partition positioned near deflecting coils | Akio Yamada, Yoshihisa Oae, Hiroshi Yasuda | 1994-08-16 |