Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9222430 | Multicore processor and onboard electronic control unit using same | Tetsuaki Wakabayashi | 2015-12-29 |
| 7089149 | Method and apparatus for detecting an angle of a rotating shaft | Junji Sugiura, Takayoshi Honda | 2006-08-08 |
| 6646275 | Charged particle beam exposure system and method | Yoshihisa Oae, Tomohiko Abe, Shigeru Maruyama, Hiroshi Yasuda, Kenichi Miyazawa +4 more | 2003-11-11 |
| 6486479 | Charged particle beam exposure system and method | Yoshihisa Oae, Tomohiko Abe, Shigeru Maruyama, Hiroshi Yasuda, Kenichi Miyazawa +4 more | 2002-11-26 |
| 6433716 | Data conversion device having mediator for determining data conversion order | Hirofumi Isomura | 2002-08-13 |
| 6188074 | Charged particle beam exposure apparatus | Takamasa Satoh | 2001-02-13 |
| 6118129 | Method and system for exposing an exposure pattern on an object by a charged particle beam which is shaped into a plurality of beam elements | Yoshihisa Oae, Tomohiko Abe, Shigeru Maruyama, Hiroshi Yasuda, Kenichi Miyazawa +4 more | 2000-09-12 |
| 6072185 | Charged-particle-beam exposure device and method capable of high-speed data reading | Kenichi Miyazawa, Hidefumi Yabara, Hiroshi Yasuda | 2000-06-06 |
| 6064807 | Charged-particle beam exposure system and method | Junichi Kai, Hiroshi Yasuda, Shunsuke Hueki, Yoshihisa Oae | 2000-05-16 |
| 6057907 | Method of and system for exposing pattern on object by charged particle beam | Takamasa Satoh, Kenichi Miyazawa, Yoshihisa Ooaeh, Junichi Kai, Hiroshi Yasuda | 2000-05-02 |
| 5977548 | Charged particle beam exposure system and method | Yoshihisa Oae, Tomohiko Abe, Shigeru Maruyama, Hiroshi Yasuda, Kenichi Miyazawa +4 more | 1999-11-02 |
| 5965895 | Method of providing changed particle beam exposure in which representative aligning marks on an object are detected to calculate an actual position to perform exposure | Takamasa Satoh, Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Hisayasu Nishino +8 more | 1999-10-12 |
| 5920077 | Charged particle beam exposure system | Yoshihisa Oae, Tomohiko Abe, Shigeru Maruyama, Hiroshi Yasuda, Kenichi Miyazawa +4 more | 1999-07-06 |
| 5910658 | Method and system for changed particle beam exposure | Kenichi Miyazawa, Hidefumi Yabara, Hiroshi Yasuda, Takayuki Nakatani | 1999-06-08 |
| 5866300 | Method of and system for exposing pattern on object by charged particle beam | Takamasa Satoh, Kenichi Miyazawa, Yoshihisa Ooaeh, Junichi Kai, Hiroshi Yasuda | 1999-02-02 |
| 5841145 | Method of and system for exposing pattern on object by charged particle beam | Takamasa Satoh, Yoshihisa Oae, Kenichi Miyazawa, Hiroshi Yasuda, Manabu Ohno +5 more | 1998-11-24 |
| 5721432 | Method of and system for charged particle beam exposure | Takamasa Satoh, Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Hisayasu Nishino +8 more | 1998-02-24 |
| 5719402 | Method of and system for charged particle beam exposure | Takamasa Satoh, Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Hisayasu Nishino +8 more | 1998-02-17 |
| 5614725 | Charged particle beam exposure system and method | Yoshihisa Oae, Tomohiko Abe, Shigeru Maruyama, Hiroshi Yasuda, Kenichi Miyazawa +4 more | 1997-03-25 |
| 5546319 | Method of and system for charged particle beam exposure | Takamasa Satoh, Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Hisayasu Nishino +8 more | 1996-08-13 |
| 5528048 | Charged particle beam exposure system and method | Yoshihisa Oae, Tomohiko Abe, Shigeru Maruyama, Hiroshi Yasuda, Kenichi Miyazawa +4 more | 1996-06-18 |
| 5401974 | Charged particle beam exposure apparatus and method of cleaning the same | Yoshihisa Oae, Takamasa Satoh, Yasushi Takahashi, Kiichi Sakamoto, Hiroshi Yasuda +1 more | 1995-03-28 |
| 5399872 | Charged-particle beam exposure method | Hiroshi Yasuda, Junichi Kai, Hisayasu Nishino, Yoshihisa Oae | 1995-03-21 |
| 5369282 | Electron beam exposure method and system for exposing a pattern on a substrate with an improved accuracy and throughput | Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae | 1994-11-29 |