Issued Patents All Time
Showing 25 most recent of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10107640 | Vehicular travel condition monitoring apparatus | — | 2018-10-23 |
| 10049854 | Charged particle beam lens apparatus, charged particle beam column, and charged particle beam exposure apparatus | Shinichi Kojima | 2018-08-14 |
| 7544951 | Electron gun assembly | Rodney Kendall | 2009-06-09 |
| 6858977 | Cathode-ray tube and cathode-ray tube manufacturing method | Tsuneharu Nomura, Norihiro Ohse, Michihisa Yano, Seiji Kawaberi, Hisashi Kimura +1 more | 2005-02-22 |
| 6646275 | Charged particle beam exposure system and method | Yoshihisa Oae, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda, Kenichi Miyazawa +4 more | 2003-11-11 |
| 6509568 | Electrostatic deflector for electron beam exposure apparatus | Yoshihisa Ooae, Hitoshi Tanaka, Takeshi Haraguchi, Kazuto Ashiwara, Ryoji Kato | 2003-01-21 |
| 6486479 | Charged particle beam exposure system and method | Yoshihisa Oae, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda, Kenichi Miyazawa +4 more | 2002-11-26 |
| 6465796 | Charge-particle beam lithography system of blanking aperture array type | Takeshi Haraguchi, Yoshihisa Ooae | 2002-10-15 |
| 6268606 | Electrostatic deflector, for electron beam exposure apparatus, with reduced charge-up | Yoshihisa Ooae, Hiroshi Yasuda | 2001-07-31 |
| 6242751 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Akio Takemoto, Yoshihisa Ooaeh, Hiroshi Yasuda, Takamasa Satoh, Hideki Nasuno +7 more | 2001-06-05 |
| 6118129 | Method and system for exposing an exposure pattern on an object by a charged particle beam which is shaped into a plurality of beam elements | Yoshihisa Oae, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda, Kenichi Miyazawa +4 more | 2000-09-12 |
| 6055719 | Method for manufacturing an electrostatic deflector | Yoshihisa Ooaeh, Hiroshi Yasuda | 2000-05-02 |
| 5977548 | Charged particle beam exposure system and method | Yoshihisa Oae, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda, Kenichi Miyazawa +4 more | 1999-11-02 |
| 5969365 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Akio Takemoto, Yoshihisa Ooaeh, Hiroshi Yasuda, Takamasa Satoh, Hideki Nasuno +7 more | 1999-10-19 |
| 5965895 | Method of providing changed particle beam exposure in which representative aligning marks on an object are detected to calculate an actual position to perform exposure | Takamasa Satoh, Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Hisayasu Nishino +8 more | 1999-10-12 |
| 5949078 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Yoshihisa Ooaeh, Akio Yamada, Hiroshi Yasuda, Kenj Kudoh, Kouzi Takahata | 1999-09-07 |
| 5920077 | Charged particle beam exposure system | Yoshihisa Oae, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda, Kenichi Miyazawa +4 more | 1999-07-06 |
| 5872366 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Yoshihisa Ooaeh, Akio Yamada, Hiroshi Yasuda, Kenj Kudoh, Kouzi Takahata | 1999-02-16 |
| 5841145 | Method of and system for exposing pattern on object by charged particle beam | Takamasa Satoh, Yoshihisa Oae, Soichiro Arai, Kenichi Miyazawa, Hiroshi Yasuda +5 more | 1998-11-24 |
| 5770862 | Charged particle exposure apparatus, and a charged particle exposure method | Yoshihisa Ooaeh, Hiroshi Yasuda | 1998-06-23 |
| 5757015 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Akio Takemoto, Yoshihisa Ooaeh, Hiroshi Yasuda, Takamasa Satoh, Hideki Nasuno +7 more | 1998-05-26 |
| 5721432 | Method of and system for charged particle beam exposure | Takamasa Satoh, Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Hisayasu Nishino +8 more | 1998-02-24 |
| 5719402 | Method of and system for charged particle beam exposure | Takamasa Satoh, Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Hisayasu Nishino +8 more | 1998-02-17 |
| 5614725 | Charged particle beam exposure system and method | Yoshihisa Oae, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda, Kenichi Miyazawa +4 more | 1997-03-25 |
| 5590048 | Block exposure pattern data extracting system and method for charged particle beam exposure | Hiroshi Yasuda, Kiichi Sakamoto, Yoshihisa Oae | 1996-12-31 |