Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6573519 | Electron beam exposure apparatus, adjusting method, and block mask for adjustment | — | 2003-06-03 |
| 6242751 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Yoshihisa Ooaeh, Tomohiko Abe, Hiroshi Yasuda, Takamasa Satoh, Hideki Nasuno +7 more | 2001-06-05 |
| 5969365 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Yoshihisa Ooaeh, Tomohiko Abe, Hiroshi Yasuda, Takamasa Satoh, Hideki Nasuno +7 more | 1999-10-19 |
| 5757015 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Yoshihisa Ooaeh, Tomohiko Abe, Hiroshi Yasuda, Takamasa Satoh, Hideki Nasuno +7 more | 1998-05-26 |