Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6420700 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Kenichi Kawakami | 2002-07-16 |
| 6242751 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Akio Takemoto, Tomohiko Abe, Hiroshi Yasuda, Takamasa Satoh, Hideki Nasuno +7 more | 2001-06-05 |
| 6055719 | Method for manufacturing an electrostatic deflector | Tomohiko Abe, Hiroshi Yasuda | 2000-05-02 |
| 6057907 | Method of and system for exposing pattern on object by charged particle beam | Takamasa Satoh, Soichiro Arai, Kenichi Miyazawa, Junichi Kai, Hiroshi Yasuda | 2000-05-02 |
| 5981960 | Charged particle beam exposure method and apparatus therefor | Akio Yamada, Hiroshi Yasuda, Hitoshi Tanaka | 1999-11-09 |
| 5969365 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Akio Takemoto, Tomohiko Abe, Hiroshi Yasuda, Takamasa Satoh, Hideki Nasuno +7 more | 1999-10-19 |
| 5949078 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Tomohiko Abe, Akio Yamada, Hiroshi Yasuda, Kenj Kudoh, Kouzi Takahata | 1999-09-07 |
| 5872366 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Tomohiko Abe, Akio Yamada, Hiroshi Yasuda, Kenj Kudoh, Kouzi Takahata | 1999-02-16 |
| 5866300 | Method of and system for exposing pattern on object by charged particle beam | Takamasa Satoh, Soichiro Arai, Kenichi Miyazawa, Junichi Kai, Hiroshi Yasuda | 1999-02-02 |
| 5854490 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Akio Yamada, Hiroshi Yasuda | 1998-12-29 |
| 5814423 | Transmission mask for charged particle beam exposure apparatuses, and an exposure apparatus using such a transmission mask | Shigeru Maruyama, Hiroshi Yasuda | 1998-09-29 |
| 5770862 | Charged particle exposure apparatus, and a charged particle exposure method | Tomohiko Abe, Hiroshi Yasuda | 1998-06-23 |
| 5757015 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Akio Takemoto, Tomohiko Abe, Hiroshi Yasuda, Takamasa Satoh, Hideki Nasuno +7 more | 1998-05-26 |