Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7919750 | Electron gun, electron beam exposure apparatus, and exposure method | Hiroshi Yasuda, Takeshi Haraguchi, Yoshihisa Ooae, Yoshinori Terui, Seiichi Sakawa +1 more | 2011-04-05 |
| 7777202 | Electron beam exposure apparatus involving the position and velocity calculation | Yoshihisa Ooae | 2010-08-17 |
| 7557357 | D/A conversion device and method and charged particle beam exposure apparatus and method | Koichi Hidaka, Ryozo Yoshino | 2009-07-07 |
| 6727658 | Electron beam generating apparatus and electron beam exposure apparatus | Yoshihisa Ooae, Yoichi Shimizu, Takeshi Haraguchi | 2004-04-27 |
| 6646275 | Charged particle beam exposure system and method | Yoshihisa Oae, Tomohiko Abe, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda +4 more | 2003-11-11 |
| 6486479 | Charged particle beam exposure system and method | Yoshihisa Oae, Tomohiko Abe, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda +4 more | 2002-11-26 |
| 6252344 | Electron gun used in an electron beam exposure apparatus | Yoshihisa Ooae, Akio Yamada, Hiroshi Yasuda | 2001-06-26 |
| 6242751 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Akio Takemoto, Yoshihisa Ooaeh, Tomohiko Abe, Hiroshi Yasuda, Hideki Nasuno +7 more | 2001-06-05 |
| 6188074 | Charged particle beam exposure apparatus | Soichiro Arai | 2001-02-13 |
| 6118129 | Method and system for exposing an exposure pattern on an object by a charged particle beam which is shaped into a plurality of beam elements | Yoshihisa Oae, Tomohiko Abe, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda +4 more | 2000-09-12 |
| 6057907 | Method of and system for exposing pattern on object by charged particle beam | Soichiro Arai, Kenichi Miyazawa, Yoshihisa Ooaeh, Junichi Kai, Hiroshi Yasuda | 2000-05-02 |
| 5977548 | Charged particle beam exposure system and method | Yoshihisa Oae, Tomohiko Abe, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda +4 more | 1999-11-02 |
| 5969365 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Akio Takemoto, Yoshihisa Ooaeh, Tomohiko Abe, Hiroshi Yasuda, Hideki Nasuno +7 more | 1999-10-19 |
| 5965895 | Method of providing changed particle beam exposure in which representative aligning marks on an object are detected to calculate an actual position to perform exposure | Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Hisayasu Nishino, Kiichi Sakamoto +8 more | 1999-10-12 |
| 5920077 | Charged particle beam exposure system | Yoshihisa Oae, Tomohiko Abe, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda +4 more | 1999-07-06 |
| 5866300 | Method of and system for exposing pattern on object by charged particle beam | Soichiro Arai, Kenichi Miyazawa, Yoshihisa Ooaeh, Junichi Kai, Hiroshi Yasuda | 1999-02-02 |
| 5841145 | Method of and system for exposing pattern on object by charged particle beam | Yoshihisa Oae, Soichiro Arai, Kenichi Miyazawa, Hiroshi Yasuda, Manabu Ohno +5 more | 1998-11-24 |
| 5757015 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Akio Takemoto, Yoshihisa Ooaeh, Tomohiko Abe, Hiroshi Yasuda, Hideki Nasuno +7 more | 1998-05-26 |
| 5744810 | Method and system for exposing pattern on object by charged particle beam | — | 1998-04-28 |
| 5721432 | Method of and system for charged particle beam exposure | Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Hisayasu Nishino, Kiichi Sakamoto +8 more | 1998-02-24 |
| 5719402 | Method of and system for charged particle beam exposure | Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Hisayasu Nishino, Kiichi Sakamoto +8 more | 1998-02-17 |
| 5631113 | Electron-beam exposure system for reduced distortion of electron beam spot | Hiroshi Yasuda, Akio Yamada, Junichi Kai, Yoshihisa Oae, Keiji Yamada +1 more | 1997-05-20 |
| 5614725 | Charged particle beam exposure system and method | Yoshihisa Oae, Tomohiko Abe, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda +4 more | 1997-03-25 |
| 5546319 | Method of and system for charged particle beam exposure | Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Hisayasu Nishino, Kiichi Sakamoto +8 more | 1996-08-13 |
| 5528048 | Charged particle beam exposure system and method | Yoshihisa Oae, Tomohiko Abe, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda +4 more | 1996-06-18 |