Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9496673 | Enclosure and method for handling electron gun or ion gun | Toshiyuki Morishita, Shimpei Hirokawa | 2016-11-15 |
| 8519608 | Electron source and electron beam apparatus | Ryozo Nonogaki | 2013-08-27 |
| 8456076 | Electron emitting source and manufacturing method of electron emitting source | Toshiyuki Morishita | 2013-06-04 |
| 8436524 | Electron source | Ryozo Nonogaki | 2013-05-07 |
| 8040034 | Electron source | Ryozo Nonogaki | 2011-10-18 |
| 7969080 | Electron source | Seiichi Sakawa | 2011-06-28 |
| 7919750 | Electron gun, electron beam exposure apparatus, and exposure method | Hiroshi Yasuda, Takeshi Haraguchi, Yoshihisa Ooae, Takamasa Satoh, Seiichi Sakawa +1 more | 2011-04-05 |
| 7722425 | Electron source manufacturing method | Seiichi Sakawa | 2010-05-25 |
| 7556749 | Electron source | Ryozo Nonogaki | 2009-07-07 |
| 6903499 | Electron gun and a method for using the same | Shinpei Hirokawa, Katsuyoshi Tsunoda | 2005-06-07 |
| 6630794 | METHOD FOR DETERMINING AN OPERATIONAL CONDITION OF A THERMAL FIELD ELECTRON EMITTER, A METHOD FOR OPERATING THE THERMAL FIELD ELECTRON EMITTER AND AN ELECTRON BEAM UTILIZING SYSTEM HAVING THE THERMAL FIELD ELECTRON EMITTER | Seiichi Sakawa | 2003-10-07 |
| 6531811 | Liquid metal ion source and method for producing the same | Naoya Kudo, Katsuyoshi Tsunoda | 2003-03-11 |
| 6509570 | Gallium ion source | Shinpei Hirokawa, Katsuyoshi Tsunoda | 2003-01-21 |
| 6133679 | Thermal field emission cathode | Katsuyoshi Tsunoda | 2000-10-17 |
| 5993636 | Method of making a needle electrode | Katsuyoshi Tsunoda | 1999-11-30 |
| 5702822 | Method for producing single crystal, and needle-like single crystal | Ryuichi Terasaki | 1997-12-30 |
| 5544617 | Method for producing single crystal, and needle-like single crystal | Ryuichi Terasaki | 1996-08-13 |
| 5536944 | Thermal field emmission electron gun | Katsuyoshi Tsunoda | 1996-07-16 |