Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5444257 | Electron-beam exposure system for reduced distortion of electron beam spot | Hiroshi Yasuda, Akio Yamada, Junichi Kai, Yoshihisa Oae, Keiji Yamada +1 more | 1995-08-22 |
| 5401974 | Charged particle beam exposure apparatus and method of cleaning the same | Yoshihisa Oae, Yasushi Takahashi, Kiichi Sakamoto, Hiroshi Yasuda, Soichiro Arai +1 more | 1995-03-28 |