Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5949078 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Yoshihisa Ooaeh, Tomohiko Abe, Akio Yamada, Hiroshi Yasuda, Kenj Kudoh | 1999-09-07 |
| 5895924 | Charged particle beam exposure method and apparatus | Hiroshi Yasuda, Akio Yamada, Kazushi Ishida, Tohru Ikeda | 1999-04-20 |
| 5872366 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Yoshihisa Ooaeh, Tomohiko Abe, Akio Yamada, Hiroshi Yasuda, Kenj Kudoh | 1999-02-16 |