Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8223045 | D/A converter and electron beam exposure apparatus | — | 2012-07-17 |
| 6399954 | Charged-particle beam lithography apparatus and system capable of readily detecting abnormality in controlling on-off operation | Isamu Seto, Atsushi Saito | 2002-06-04 |
| 6242751 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Akio Takemoto, Yoshihisa Ooaeh, Tomohiko Abe, Hiroshi Yasuda, Takamasa Satoh +7 more | 2001-06-05 |
| 6072185 | Charged-particle-beam exposure device and method capable of high-speed data reading | Soichiro Arai, Kenichi Miyazawa, Hiroshi Yasuda | 2000-06-06 |
| 5969365 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Akio Takemoto, Yoshihisa Ooaeh, Tomohiko Abe, Hiroshi Yasuda, Takamasa Satoh +7 more | 1999-10-19 |
| 5965895 | Method of providing changed particle beam exposure in which representative aligning marks on an object are detected to calculate an actual position to perform exposure | Takamasa Satoh, Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Hisayasu Nishino +8 more | 1999-10-12 |
| 5910658 | Method and system for changed particle beam exposure | Soichiro Arai, Kenichi Miyazawa, Hiroshi Yasuda, Takayuki Nakatani | 1999-06-08 |
| 5808313 | Charged particle beam exposure method and charged particle beam exposure apparatus | Akio Yamada, Hiroshi Yasuda, Atsushi Saito | 1998-09-15 |
| 5757015 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Akio Takemoto, Yoshihisa Ooaeh, Tomohiko Abe, Hiroshi Yasuda, Takamasa Satoh +7 more | 1998-05-26 |
| 5721432 | Method of and system for charged particle beam exposure | Takamasa Satoh, Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Hisayasu Nishino +8 more | 1998-02-24 |
| 5719402 | Method of and system for charged particle beam exposure | Takamasa Satoh, Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Hisayasu Nishino +8 more | 1998-02-17 |
| 5546319 | Method of and system for charged particle beam exposure | Takamasa Satoh, Hiroshi Yasuda, Junichi Kai, Yoshihisa Oae, Hisayasu Nishino +8 more | 1996-08-13 |
| 5134398 | Digital-to-analog converter having a circuit for compensating for variation in output dependent on temperature change | Nobuyuki Yasutake | 1992-07-28 |