Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6414325 | Charged particle beam exposure apparatus and exposure method capable of highly accurate exposure in the presence of partial unevenness on the surface of exposed specimen | Akio Yamada | 2002-07-02 |
| 6407398 | Electron beam exposure apparatus and exposure method | Masaki Kurokawa, Yoshihisa Ooae | 2002-06-18 |
| 6242751 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Akio Takemoto, Yoshihisa Ooaeh, Tomohiko Abe, Hiroshi Yasuda, Takamasa Satoh +7 more | 2001-06-05 |
| 5969365 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Akio Takemoto, Yoshihisa Ooaeh, Tomohiko Abe, Hiroshi Yasuda, Takamasa Satoh +7 more | 1999-10-19 |
| 5966200 | Charged particle beam exposure apparatus | Kenichi Kawakami, Kazushi Ishida, Akiyoshi Tsuda | 1999-10-12 |
| 5945683 | Electron beam exposure device | Yoshihisa Ooae, Hitoshi Tanaka, Hiroshi Yasuda | 1999-08-31 |
| 5892237 | Charged particle beam exposure method and apparatus | Kenichi Kawakami, Hiroshi Yasuda, Akio Yamada, Mitsuhiro Nakano, Atsushi Saito +1 more | 1999-04-06 |
| 5757015 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Akio Takemoto, Yoshihisa Ooaeh, Tomohiko Abe, Hiroshi Yasuda, Takamasa Satoh +7 more | 1998-05-26 |
| 5708276 | Electron-beam exposure device and a method of detecting a mark position for the device | Kawakami Kenichi, Yoshihisa Ooae, Tohru Ikeda, Kazushi Ishida | 1998-01-13 |