KK

Kawakami Kenichi

Fujitsu Limited: 1 patents #14,843 of 24,456Top 65%
Overall (All Time): #3,673,904 of 4,157,543Top 90%
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Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5708276 Electron-beam exposure device and a method of detecting a mark position for the device Tatsuro Ohkawa, Yoshihisa Ooae, Tohru Ikeda, Kazushi Ishida 1998-01-13