| 8994806 |
Microscope apparatus chronologically storing different types of image information |
Tatsuo Nakata |
2015-03-31 |
| 8792703 |
Method for tracking cells |
Kosuke Takagi |
2014-07-29 |
| 8222619 |
Multi-column electron beam exposure apparatus and multi-column electron beam exposure method |
Akio Yamada, Hiroshi Yasuda, Takashi Kiuchi |
2012-07-17 |
| 7982948 |
Scanning microscope for 3-D imaging of a moving specimen |
— |
2011-07-19 |
| 7983466 |
Microscope apparatus and cell observation method |
Tatsuo Nakata |
2011-07-19 |
| 7696996 |
Laser scanning microscope apparatus |
Toshiyuki Hattori, Yusuke Yamashita, Hiroshi Hirayama, Tatsuo Nakata |
2010-04-13 |
| 5892237 |
Charged particle beam exposure method and apparatus |
Kenichi Kawakami, Hiroshi Yasuda, Akio Yamada, Tatsuro Ohkawa, Atsushi Saito +1 more |
1999-04-06 |
| 5610406 |
Charged particle beam exposure method and apparatus |
Junichi Kai |
1997-03-11 |
| 5334846 |
Correction of charged particle beam exposure deflection by detecting stage position and a position detection mark |
Junichi Kai |
1994-08-02 |
| 5329130 |
Charged particle beam exposure method and apparatus |
Junichi Kai, Hiroshi Yasuda, Kazutaka Taki |
1994-07-12 |