Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5434795 | Method of forming pattern having optical angle in charged particle exposure system | Junichi Kai, Hiroshi Yasuda, Kenichi Miyazawa | 1995-07-18 |
| 5329130 | Charged particle beam exposure method and apparatus | Junichi Kai, Hiroshi Yasuda, Mitsuhiro Nakano | 1994-07-12 |
| 5225684 | Charged particle beam exposure apparatus control system and a method of operation for providing a drawing start signal | Hiroshi Yasuda, Junichi Kai, Atsushi Saito, Kiichi Sakamoto | 1993-07-06 |
| 5134300 | Method and apparatus for controlling charged particle beams in charged particle beam exposure system | Junichi Kai, Hiroshi Yasuda | 1992-07-28 |
| 5093025 | Cholesteric liquid crystal polyester containing optically active group | Naoyuki Koide, Kazuyoshi Iimura | 1992-03-03 |