Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6015975 | Method and apparatus for charged particle beam exposure | Kenichi Kawakami, Kobayashi Katsuhiko, Akio Yamada, Koichi Yamashita, Naoki Nishio | 2000-01-18 |
MS
Masahiko Susa
Overall (All Time): #3,604,753 of 4,157,543Top 90%
1
Patents All Time