Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6015975 | Method and apparatus for charged particle beam exposure | Kenichi Kawakami, Masahiko Susa, Akio Yamada, Koichi Yamashita, Naoki Nishio | 2000-01-18 |
| 4804262 | Automatic perimeter | Shioiri Takashi, Tago Hideo | 1989-02-14 |
| 4679920 | Automatic perimeter | Shioiri Takashi, Tago Hideo | 1987-07-14 |