Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6222195 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Akio Yamada, Hitoshi Watanabe, Satoru Yamazaki, Kiichi Sakamoto, Manabu Ohno +2 more | 2001-04-24 |
| 6137111 | Charged particle-beam exposure device and charged-particle-beam exposure method | Akio Yamada, Hitoshi Watanabe, Satoru Yamazaki, Kiichi Sakamoto, Manabu Ohno +2 more | 2000-10-24 |
| 5830612 | Method of detecting a deficiency in a charged-particle-beam exposure mask | Akio Yamada, Hitoshi Watanabe, Satoru Yamazaki, Kiichi Sakamoto, Manabu Ohno +2 more | 1998-11-03 |