Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10953419 | Gas atomization nozzle and gas atomization device | Tadayuki HANADA, Kenji Suzuki, Kenji Doi, Shuntaro TERAUCHI, Hisashi KITAGAKI | 2021-03-23 |
| 9035170 | Light power generation device | Jose Briceno | 2015-05-19 |
| 6222195 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Akio Yamada, Satoru Sagou, Hitoshi Watanabe, Kiichi Sakamoto, Manabu Ohno +2 more | 2001-04-24 |
| 6137111 | Charged particle-beam exposure device and charged-particle-beam exposure method | Akio Yamada, Satoru Sagou, Hitoshi Watanabe, Kiichi Sakamoto, Manabu Ohno +2 more | 2000-10-24 |
| 6090527 | Electron beam exposure mask and method of manufacturing the same and electron beam exposure method | Kiichi Sakamoto, Hiroshi Yasuda, Takayuki Sakakibara, Satoru Sagoh | 2000-07-18 |
| 5952155 | Mask and method of creating mask as well as electron-beam exposure method and electron-beam exposure device | Takayuki Sakakibara, Satoru Sagoh, Kiichi Sakamoto, Hiroshi Yasuda | 1999-09-14 |
| 5849437 | Electron beam exposure mask and method of manufacturing the same and electron beam exposure method | Kiichi Sakamoto, Hiroshi Yasuda, Takayuki Sakakibara, Satoru Sagoh | 1998-12-15 |
| 5830612 | Method of detecting a deficiency in a charged-particle-beam exposure mask | Akio Yamada, Satoru Sagou, Hitoshi Watanabe, Kiichi Sakamoto, Manabu Ohno +2 more | 1998-11-03 |
| 5824437 | Mask and method of creating mask as well as electron-beam exposure method and electron-beam exposure device | Takayuki Sakakibara, Satoru Sagoh, Kiichi Sakamoto, Hiroshi Yasuda | 1998-10-20 |
| 5537487 | Pattern judging method, mask producing method, and method of dividing block pattern for use in block exposure | Masaaki Miyajima, Hiroshi Yasuda, Kiichi Sakamoto | 1996-07-16 |
| 5478157 | Printing apparatus | Nobuo Kohno, Yoichi Kobayashi, Hiroaki Takano, Masahiko Yamasaki, Toshihiko Konnai | 1995-12-26 |
| 5432314 | Transparent mask plate for charged particle beam exposure apparatus and charged particle beam exposure process using the transparent mask plate | Yoshihisa Oae, Kiichi Sakamoto, Akio Yamada | 1995-07-11 |
| 5391886 | Charged particle beam exposure system and method of exposing a pattern on an object by such a charged particle beam exposure system | Akio Yamada, Yoshihisa Oae, Tomohiko Abe, Katsuhiko Kobayashi, Kiichi Sakamoto +1 more | 1995-02-21 |
| 5347592 | Pattern judging method and mask producing method using the pattern judging method | Hiroshi Yasuda, Kiichi Sakamoto | 1994-09-13 |
| 5304811 | Lithography system using charged-particle beam and method of using the same | Akio Yamada, Yoshihisa Oae, Tomohiko Abe | 1994-04-19 |
| 5256881 | Mask and charged particle beam exposure method using the mask | Hiroshi Yasuda, Kiichi Sakamoto | 1993-10-26 |