Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418445 | Silicon carbide semiconductor device and method of manufacturing a silicon carbide semiconductor device | Mina Ryo, Takeshi Tawara, Masaki Miyazato | 2019-09-17 |
| 8141009 | Preparing data for hybrid exposure using both electron beam exposure and reticle exposure in lithographic process | Hiromi Hoshino, Hiroshi Takita, Kozo Ogino | 2012-03-20 |
| 7205557 | Variable rectangle-type electron beam exposure apparatus and pattern exposure-formation method | Yutaka Nakamura, Hiromi Hoshino | 2007-04-17 |
| 6275604 | Method and apparatus for generating semiconductor exposure data | Yoshio Ito | 2001-08-14 |
| 5995878 | Method and apparatus for generating exposure data of semiconductor integrated circuit | — | 1999-11-30 |
| 5984505 | Block exposure of semiconductor wafer | — | 1999-11-16 |
| 5917579 | Block exposure of semiconductor wafer | — | 1999-06-29 |
| 5537487 | Pattern judging method, mask producing method, and method of dividing block pattern for use in block exposure | Hiroshi Yasuda, Satoru Yamazaki, Kiichi Sakamoto | 1996-07-16 |
| 5046012 | Pattern data processing method | Kazumasa Morishita, Yoshitada Aihara, Yoshihisa Komura, Minoru Suzuki | 1991-09-03 |