Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8553198 | Mask pattern correction device, method of correcting mask pattern, light exposure correction device, and method of correcting light exposure | Teruyoshi Yao, Satoru Asai, Morimi Osawa, Hiromi Hoshino, Kouzou Ogino | 2013-10-08 |
| 8316328 | Apparatus for manufacturing a photomask | Hiroki Futatsuya | 2012-11-20 |
| 8227153 | Mask pattern correction device, method of correcting mask pattern, light exposure correction device, and method of correcting light exposure | Teruyoshi Yao, Satoru Asai, Morimi Osawa, Hiromi Hoshino, Kouzou Ogino | 2012-07-24 |
| 8185848 | Apparatus for performing a manufacturing method of a photomask | Hiroki Futatsuya | 2012-05-22 |
| 8037427 | Method for manufacturing a photomask | Hiroki Futatsuya | 2011-10-11 |
| 7926003 | Method for manufacturing a photomask | Hiroki Futatsuya | 2011-04-12 |
| 7732107 | Mask pattern correction device, method of correcting mask pattern, light exposure correction device, and method of correcting light exposure | Teruyoshi Yao, Satoru Asai, Morimi Osawa, Hiromi Hoshino, Kouzou Ogino | 2010-06-08 |
| 7562334 | Method for manufacturing a photomask | Hiroki Futatsuya | 2009-07-14 |
| 5046012 | Pattern data processing method | Yoshitada Aihara, Yoshihisa Komura, Masaaki Miyajima, Minoru Suzuki | 1991-09-03 |