Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8349540 | Semiconductor device manufacturing method | Yuji Setta | 2013-01-08 |
| 8349541 | Semiconductor device manufacturing method | Yuji Setta | 2013-01-08 |
| 8316328 | Apparatus for manufacturing a photomask | Kazumasa Morishita | 2012-11-20 |
| 8185848 | Apparatus for performing a manufacturing method of a photomask | Kazumasa Morishita | 2012-05-22 |
| 8037427 | Method for manufacturing a photomask | Kazumasa Morishita | 2011-10-11 |
| 7926003 | Method for manufacturing a photomask | Kazumasa Morishita | 2011-04-12 |
| 7577556 | Method and equipment for simulation | Satoru Asai | 2009-08-18 |
| 7562334 | Method for manufacturing a photomask | Kazumasa Morishita | 2009-07-14 |
| 7519943 | Photomask fabrication method | — | 2009-04-14 |
| 7047516 | Proximity effect correction apparatus, proximity effect correction method, storage medium, and computer program product | — | 2006-05-16 |
| 6862726 | Light intensity simulation method, program product, and designing method of photomask | Morimi Osawa | 2005-03-01 |