Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6090527 | Electron beam exposure mask and method of manufacturing the same and electron beam exposure method | Satoru Yamazaki, Kiichi Sakamoto, Hiroshi Yasuda, Takayuki Sakakibara | 2000-07-18 |
| 5952155 | Mask and method of creating mask as well as electron-beam exposure method and electron-beam exposure device | Takayuki Sakakibara, Satoru Yamazaki, Kiichi Sakamoto, Hiroshi Yasuda | 1999-09-14 |
| 5849437 | Electron beam exposure mask and method of manufacturing the same and electron beam exposure method | Satoru Yamazaki, Kiichi Sakamoto, Hiroshi Yasuda, Takayuki Sakakibara | 1998-12-15 |
| 5824437 | Mask and method of creating mask as well as electron-beam exposure method and electron-beam exposure device | Takayuki Sakakibara, Satoru Yamazaki, Kiichi Sakamoto, Hiroshi Yasuda | 1998-10-20 |