Issued Patents All Time
Showing 26–50 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10176979 | Post-CMP removal using compositions and method of use | Jun Liu, Jeffrey A. Barnes, Laisheng Sun, Elizabeth THOMAS, Jason Y.H. Chang | 2019-01-08 |
| 10138117 | Aqueous formulations for removing metal hard mask and post-etch residue with Cu/W compatibility | Li-Min Chen, Steven Lippy, Daniela White | 2018-11-27 |
| 9929014 | Dopant precursors for mono-layer doping | Thomas M. Cameron, Sung Han | 2018-03-27 |
| 9831088 | Composition and process for selectively etching metal nitrides | Tianniu Chen, Nicole E. Thomas, Steven Lippy, Jeffrey A. Barnes, Peng Zhang | 2017-11-28 |
| 9765288 | Compositions for cleaning III-V semiconductor materials and methods of using same | Hsing-Chen Wu, Min-Chieh Yang, Sheng-Hung Tu, Li-Min Chen | 2017-09-19 |
| 9691629 | Compositions and methods for the selective removal of silicon nitride | Eileen Sparks, William R. Bowers, Mark A. Biscotto, Kevin P. Yanders, Michael B. Korzenski | 2017-06-27 |
| 9678430 | Composition and process for stripping photoresist from a surface including titanium nitride | Marc Conner, Michael W. Owens | 2017-06-13 |
| RE46427 | Antioxidants for post-CMP cleaning formulations | David Angst, Peng Zhang, Jeffrey A. Barnes, Prerna Sonthalia, Karl E. Boggs | 2017-06-06 |
| 9546321 | Compositions and methods for selectively etching titanium nitride | Jeffrey A. Barnes, Li-Min Chen, Steven Lippy, Rekha Rajaram, Sheng-Hung Tu | 2017-01-17 |
| 9528078 | Antioxidants for post-CMP cleaning formulations | David Angst, Peng Zhang, Jeffrey A. Barnes, Prerna Sonthalia, Karl E. Boggs | 2016-12-27 |
| 9520617 | Sulfolane mixtures as ambient aprotic polar solvents | — | 2016-12-13 |
| 9416338 | Composition for and method of suppressing titanium nitride corrosion | George G. Totir, Makonnen Payne | 2016-08-16 |
| 9158203 | Compositions and methods for the selective removal of silicon nitride | Eileen Sparks, William R. Bowers, Mark A. Biscotto, Kevin P. Yanders, Michael B. Korzenski +2 more | 2015-10-13 |
| 8778210 | Compositions and methods for the selective removal of silicon nitride | Eileen Sparks, William R. Bowers, Mark A. Biscotto, Kevin P. Yanders, Michael B. Korzenski +2 more | 2014-07-15 |
| 8685909 | Antioxidants for post-CMP cleaning formulations | David Angst, Peng Zhang, Jeffrey A. Barnes, Prerna Sonthalia, Karl E. Boggs | 2014-04-01 |
| 8618036 | Aqueous cerium-containing solution having an extended bath lifetime for removing mask material | Ali Afzali-Ardakani, John A. Fitzsimmons, Nicholas C. M. Fuller, Mahmoud Khojasteh, Jennifer V. Muncy +4 more | 2013-12-31 |
| 8367555 | Removal of masking material | Ali Afzali-Ardakani, Mahmoud Khojasteh, Ronald W. Nunes, George G. Totir | 2013-02-05 |
| 8026200 | Low pH mixtures for the removal of high density implanted resist | Julie Cissell, Renjie Zhou, Michael B. Korzenski, George G. Totir, Mahmoud Khojasteh | 2011-09-27 |
| 7976723 | Method for kinetically controlled etching of copper | David L. Rath | 2011-07-12 |
| 7868410 | Gate stack engineering by electrochemical processing utilizing through-gate-dielectric current flow | Philippe M. Vereecken, Veeraraghavan S. Basker, Cyril Cabral, Jr., Hariklia Deligianni, Martin M. Frank +4 more | 2011-01-11 |
| 7736474 | Plating apparatus and plating method | Keiichi Kurashina, Mizuki Nagai, Satoru Yamamoto, Hiroyuki Kanda, Koji Mishima +7 more | 2010-06-15 |
| 7537709 | Method for isotropic etching of copper | Bruce K. Furman, David L. Rath | 2009-05-26 |
| 7368045 | Gate stack engineering by electrochemical processing utilizing through-gate-dielectric current flow | Philippe M. Vereecken, Veeraraghavan S. Basker, Cyril Cabral, Jr., Hariklia Deligianni, Martin M. Frank +4 more | 2008-05-06 |
| 7276296 | Immersion plating and plated structures | Charles C. Goldsmith, Stephen Kilpatrick, Carmen M. Mojica, Henry A. Nye, III | 2007-10-02 |
| 7217655 | Electroplated CoWP composite structures as copper barrier layers | Cyril Cabral, Jr., Stefanie Chiras, Hariklia Deligianni, Andrew J. Kellock, Judith M. Rubino +1 more | 2007-05-15 |