Issued Patents All Time
Showing 76–100 of 118 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7875863 | Illumination system, lithographic apparatus, mirror, method of removing contamination from a mirror and device manufacturing method | Vadim Yevgenyevich Banine, Mandeep Singh, Harm-Jan Voorma, Derk Jan Wilfred Klunder | 2011-01-25 |
| 7863591 | Radiation system and lithographic apparatus comprising the same | Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder, Wouter Anthon Soer, Johannes Christiaan Leonardus Franken, Olav Waldemar Vladimir Frijns +1 more | 2011-01-04 |
| 7839482 | Assembly comprising a radiation source, a reflector and a contaminant barrier | Wouter Anthon Soer | 2010-11-23 |
| 7812330 | Radical cleaning arrangement for a lithographic apparatus | Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn, Derk Jan Wilfred Klunder | 2010-10-12 |
| 7771896 | Patterning device, method of providing a patterning device, photolithographic apparatus and device manufacturing method | Wouter Anthon Soer, Vadim Yevgenyevich Banine | 2010-08-10 |
| 7759663 | Self-shading electrodes for debris suppression in an EUV source | Wouter Anthon Soer | 2010-07-20 |
| 7750326 | Lithographic apparatus and cleaning method therefor | Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder | 2010-07-06 |
| 7737418 | Debris mitigation system and lithographic apparatus | Wouter Anthon Soer | 2010-06-15 |
| 7736820 | Anti-reflection coating for an EUV mask | Vadim Yevgenyevich Banine, Koen Van Ingen Schenau, Derk Jan Wilfred Klunder | 2010-06-15 |
| 7724349 | Device arranged to measure a quantity relating to radiation and lithographic apparatus | Wouter Anthon Soer, Niels Machiel Driessen, Vadim Yevgenyevich Banine, Johannes Christiaan Leonardus Franken, Olav Waldemar Vladimir Frijns +1 more | 2010-05-25 |
| 7706057 | Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method | Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder | 2010-04-27 |
| 7696493 | Radiation system and lithographic apparatus | Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Derk Jan Wilfred Klunder | 2010-04-13 |
| 7696492 | Radiation system and lithographic apparatus | Arnoud Cornelis Wassink, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Theodorus Petrus Maria Cadee +4 more | 2010-04-13 |
| 7692169 | Method for filtering particles out of a beam of radiation and filter for a lithographic apparatus | Levinus Pieter Bakker, Derk Jan Wilfred Klunder | 2010-04-06 |
| 7687788 | Debris prevention system, radiation system, and lithographic apparatus | Wouter Anthon Soer, Kurt Gielissen | 2010-03-30 |
| 7629594 | Lithographic apparatus, and device manufacturing method | Vadim Yevgenyevich Banine, Johannes Peterus Henricus De Kuster, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens, Bastiaan Theodoor Wolschrijn +5 more | 2009-12-08 |
| 7629593 | Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method | Edwin Johan Buis, Vadim Yevgenyevich Banine, Tjarko Adriaan Rudolf Van Empel, Wouter Anthon Soer | 2009-12-08 |
| 7615760 | Luminescence sensor comprising at least two wire grids | Henk Van Houten, Derk Jan Wilfred Klunder | 2009-11-10 |
| 7615767 | Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby | Wouter Anthon Soer | 2009-11-10 |
| 7598503 | Lithographic apparatus and cleaning method therefor | Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder, Johannes Hubertus Josephina Moors | 2009-10-06 |
| 7560708 | Luminescence sensor using multi-layer substrate structure | Derk Jan Wilfred Klunder | 2009-07-14 |
| 7561247 | Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus | Carolus Ida Maria Antonius Spee, Derk Jan Wilfred Klunder, Antonius Maria Bernardus De Mol | 2009-07-14 |
| 7541603 | Radiation system and lithographic apparatus comprising the same | Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder, Wouter Anthon Soer, Johannes Christiaan Leonardus Franken, Olav Waldemar Vladimir Frijns +1 more | 2009-06-02 |
| 7518128 | Lithographic apparatus comprising a cleaning arrangement, cleaning arrangement and method for cleaning a surface to be cleaned | Derk Jan Wilfred Klunder | 2009-04-14 |
| 7504643 | Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement | Johannes Maria Freriks, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Derk Jan Wilfred Klunder | 2009-03-17 |