Issued Patents All Time
Showing 101–118 of 118 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7473908 | Getter and cleaning arrangement for a lithographic apparatus and method for cleaning a surface | Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Wouter Anton Soer | 2009-01-06 |
| 7468521 | Lithographic apparatus and device manufacturing method | Derk Jan Wilfred Klunder, Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Frank Jeroen Pieter Schuurmans, Dominik Marcel Vaudrevange | 2008-12-23 |
| 7465943 | Controlling the flow through the collector during cleaning | Vadim Yevgenyevich Banine, Sonia Margart Skelly, Derk Jan Wilfred Klunder | 2008-12-16 |
| 7462850 | Radical cleaning arrangement for a lithographic apparatus | Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn, Derk Jan Wilfred Klunder | 2008-12-09 |
| 7463413 | Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method | Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder | 2008-12-09 |
| 7453645 | Spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby | Derk Jan Wilfred Klunder | 2008-11-18 |
| 7414700 | Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus | Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Carolus Ida Maria Antonius Spee, Derk Jan Wilfred Klunder | 2008-08-19 |
| 7397538 | Radiation system and lithographic apparatus | Wilhelmus Josephus Box, Derk Jan Wilfred Klunder, Niels Machiel Driessen, Hendrikus Gijsbertus Schimmel | 2008-07-08 |
| 7372049 | Lithographic apparatus including a cleaning device and method for cleaning an optical element | Derk Jan Wilfred Klunder | 2008-05-13 |
| 7355672 | Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus | Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Carolus Ida Maria Antonius Spee, Derk Jan Wilfred Klunder | 2008-04-08 |
| 7336416 | Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method | Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder | 2008-02-26 |
| 7332731 | Radiation system and lithographic apparatus | Derk Jan Wilfred Klunder | 2008-02-19 |
| 7262423 | Radiation system and lithographic apparatus | Johannes Hubertus Josephina Moors, Derk Jan Wilfred Klunder | 2007-08-28 |
| 7233010 | Radiation system and lithographic apparatus | Vadim Yevgenyevich Banine, Arnoud Cornelis Wassink, Derk Jan Wilfred Klunder | 2007-06-19 |
| 7196343 | Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby | Levinus Pieter Bakker, Derk Jan Wilfred Klunder | 2007-03-27 |
| 7145631 | Lithographic apparatus, illumination system and method for mitigating debris particles | — | 2006-12-05 |
| 7145132 | Lithographic apparatus, illumination system and debris trapping system | Levinus Pieter Bakker, Derk Jan Wilfred Klunder | 2006-12-05 |
| 7106832 | Apparatus including a radiation source, a filter system for filtering particles out of radiation emitted by the source, and a processing system for processing the radiation, a lithographic apparatus including such an apparatus, and a method of filtering particles out of radiation emitting and propagating from a radiation source | Derk Jan Wilfred Klunder, Levinus Pieter Bakker, Vadim Yevgenyevich Banine | 2006-09-12 |