Issued Patents All Time
Showing 76–100 of 101 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514934 | Atomic layer deposition of antimony oxide films | Raija H. Matero, Linda Lindroos, Hessel Sprey, David Kurt de Roest, Dieter Pierreux +3 more | 2016-12-06 |
| 9478419 | Sulfur-containing thin films | Suvi Haukka, Fu Tang, Michael Eugene Givens, Qi Xie | 2016-10-25 |
| 9472757 | Method of making a resistive random access memory device | Qi Xie, Tom E. Blomberg, Marko Tuominen, Suvi Haukka, Robin Roelofs +1 more | 2016-10-18 |
| 9461134 | Method for forming source/drain contact structure with chalcogen passivation | Qi Xie, Fu Tang, Petri Raisanen, Jacob Woodruff, Michael Eugene Givens | 2016-10-04 |
| 9385164 | Method of making a resistive random access memory device with metal-doped resistive switching layer | Qi Xie, Vladimir Machkaoutsan, Michael Eugene Givens, Petri Raisanen | 2016-07-05 |
| 9245742 | Sulfur-containing thin films | Suvi Haukka, Fu Tang, Michael Eugene Givens, Qi Xie | 2016-01-26 |
| 9240412 | Semiconductor structure and device and methods of forming same using selective epitaxial process | Qi Xie, Vladimir Machkaoutsan | 2016-01-19 |
| 9238865 | Multiple vapor sources for vapor deposition | Christophe Pomarede, Eric James Shero, Mohith Verghese, Chang-Gong Wang | 2016-01-19 |
| 9236247 | Silane and borane treatments for titanium carbide films | Jerry Chen, Vladimir Machkaoutsan, Brennan Milligan, Suvi Haukka, Eric James Shero +2 more | 2016-01-12 |
| 9136180 | Process for depositing electrode with high effective work function | Vladimir Machkaoutsan, Qi Xie | 2015-09-15 |
| 9117773 | High concentration water pulses for atomic layer deposition | Eric James Shero, Mohith Verghese | 2015-08-25 |
| 9012278 | Method of making a wire-based semiconductor device | Qi Xie, Vladimir Machkaoutsan | 2015-04-21 |
| 9006112 | Atomic layer deposition of antimony oxide films | Raija H. Matero, Linda Lindroos, Hessel Sprey, David Kurt de Roest, Dieter Pierreux +3 more | 2015-04-14 |
| 8956939 | Method of making a resistive random access memory device | Qi Xie, Vladimir Machkaoutsan, Michael Eugene Givens, Petri Raisanen | 2015-02-17 |
| 8841182 | Silane and borane treatments for titanium carbide films | Jerry Chen, Vladimir Machkaoutsan, Brennan Milligan, Suvi Haukka, Eric James Shero +2 more | 2014-09-23 |
| 8399344 | Method for adjusting the threshold voltage of a gate stack of a PMOS device | Dieter Pierreux, Vladimir Machkaoutsan | 2013-03-19 |
| 8334218 | Method of forming non-conformal layers | Sebastian E. Van Nooten, Steven Marcus, Glen Wilk, Petri Raisanen, Kai-Erik Elers | 2012-12-18 |
| 7927933 | Method to enhance the initiation of film growth | Annelies Delabie, Yashuhiro Shimamoto | 2011-04-19 |
| 7795160 | ALD of metal silicate films | Chang-Gong Wang, Eric James Shero, Glen Wilk | 2010-09-14 |
| 7629270 | Remote plasma activated nitridation | Johan Swerts, Hilde De Witte, Christophe Pomarede, Ruben Haverkort, Yuet Wan +3 more | 2009-12-08 |
| 7629267 | High stress nitride film and method for formation thereof | Yuet Wan, Rene de Blank | 2009-12-08 |
| 7608549 | Method of forming non-conformal layers | Sebastian E. Van Nooten, Steven Marcus, Glen Wilk, Petri Raisanen, Kai-Erik Elers | 2009-10-27 |
| 7465626 | Method for forming a high-k dielectric stack | Peijun Chen, Tsai Wilman, Mathieu Caymax | 2008-12-16 |
| 7323422 | Dielectric layers and methods of forming the same | Ivo Raaijmakers, Pekka Soininen | 2008-01-29 |
| 6884317 | Method and installation for etching a substrate | Hessel Sprey, Arjen Storm | 2005-04-26 |