Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8507388 | Prevention of oxidation of substrate surfaces in process chambers | Steven R. A. Van Aerde | 2013-08-13 |
| 7829457 | Protection of conductors from oxidation in deposition chambers | Tatsuya Yoshimi, Jerome Noiray | 2010-11-09 |
| 7629267 | High stress nitride film and method for formation thereof | Yuet Wan, Jan Willem Maes | 2009-12-08 |
| 5922624 | Method for semiconductor processing using mixtures of HF and carboxylic acid | Steven Verhaverbeke, Mark Heyns, Menso Hendriks | 1999-07-13 |