Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9275939 | Semiconductor device including leadframe with a combination of leads and lands and method | Jae Min Bae, Byong Jin Kim | 2016-03-01 |
| 8648450 | Semiconductor device including leadframe with a combination of leads and lands | Jae Min Bae, Byong Jin Kim | 2014-02-11 |
| 7841582 | Variable seal pressure slit valve doors for semiconductor manufacturing equipment | Toan Q. Tran, Yen-Kun Wang | 2010-11-30 |
| 7806383 | Slit valve | Toan Q. Tran, Dimitry Lubormirsky, Lun Tsuei | 2010-10-05 |
| 7758698 | Dual top gas feed through distributor for high density plasma chamber | Srivivas D. Nemani, Phong Pham, Ellie Yieh | 2010-07-20 |
| 7754282 | Adjusting a spacing between a gas distribution member and a substrate support | Kirby H. Floyd, Adrian Q. Montgomery, Jennifer Gonzales, Rong Pan, Amna Mohammed +1 more | 2010-07-13 |
| 7722719 | Gas baffle and distributor for semiconductor processing chamber | Lawrence Chung-Lai Lei, Siqing Lu, Steven Gianoulakis, David Sun, Yen-Kun Wang | 2010-05-25 |
| 7456116 | Gap-fill depositions in the formation of silicon containing dielectric materials | Nitin K. Ingle, Shan Wong, Xinyun Xia, Vikash Banthia, Yen-Kun Wang +1 more | 2008-11-25 |
| 7413612 | In situ substrate holder leveling method and apparatus | Kirby H. Floyd, Adrian Q. Montgomery, Jennifer Gonzales, Rong Pan, Amna Mohammed +1 more | 2008-08-19 |
| 7335609 | Gap-fill depositions introducing hydroxyl-containing precursors in the formation of silicon containing dielectric materials | Nitin K. Ingle, Shan Wong, Xinyun Xia, Vikash Banthia, Yen-Kun Wang | 2008-02-26 |
| 7204888 | Lift pin assembly for substrate processing | Toan Q. Tran, Daniel S. Herkalo, Yen-Kun Wang, Jin Ho Lee, Dong-Hyung LEE +1 more | 2007-04-17 |
| 7205205 | Ramp temperature techniques for improved mean wafer before clean | Yen-Kun Wang, Kevin Mukai, Theresa Marie O. Liu | 2007-04-17 |
| 7192486 | Clog-resistant gas delivery system | Yen-Kun Wang, Steve Ghanayem | 2007-03-20 |
| 7011710 | Concentration profile on demand gas delivery system (individual divert delivery system) | Yen-Kun Wang, Yeh-Jen Kao | 2006-03-14 |
| 6629559 | Molds for casting with customized internal structure to collapse upon cooling and to facilitate control of heat transfer | Emanuel M. Sachs, Michael J. Cima | 2003-10-07 |
| 6397922 | Molds for casting with customized internal structure to collapse upon cooling and to facilitate control of heat transfer | Emanuel M. Sachs, Michael J. Cima | 2002-06-04 |
| 6379492 | Corrosion resistant coating | Chen-An Chen, Shankar Venkataraman, Ajay Bhatnagar | 2002-04-30 |
| 6346481 | Method of reducing pitting of a coated heater | Chen-An Chen | 2002-02-12 |
| 6267820 | Clog resistant injection valve | Chen-An Chen | 2001-07-31 |
| 6261374 | Clog resistant gas delivery system | Chen-An Chen | 2001-07-17 |
| 6235120 | Coating for parts used in semiconductor processing chambers | Chen-An Chen | 2001-05-22 |
| 6117244 | Deposition resistant lining for CVD chamber | Ellie Yieh, Thanh Pham | 2000-09-12 |
| 6110556 | Lid assembly for a process chamber employing asymmetric flow geometries | Ellie Yieh, Thanh Pham | 2000-08-29 |
| 6090206 | Throttle valve providing enhanced cleaning | Matthew Losey, Francimar Campana, Srinivas D. Nemani, Sundar Pichai | 2000-07-18 |
| 6063198 | High pressure release device for semiconductor fabricating equipment | Visweswaren Sivaramakrishnan, Estela Guijosa | 2000-05-16 |