Issued Patents All Time
Showing 51–69 of 69 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7767024 | Method for front end of line fabrication | Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Joel M. Huston +6 more | 2010-08-03 |
| 7697260 | Detachable electrostatic chuck | Karl M. Brown, Nora Arellano, Semyon Sherstinsky, Allen Lau, Cheng-Hsiung Tsai +2 more | 2010-04-13 |
| 7658802 | Apparatus and a method for cleaning a dielectric film | Xinyu Fu, John C. Forster | 2010-02-09 |
| 7616656 | System and method for providing communication between intelligent electronic devices via an open channel | Fred Slota | 2009-11-10 |
| 7609719 | System and method for simultaneous communication on modbus and DNP 3.0 over Ethernet for electronic power meter | Erran Kagan, Fredrick Slota, Joseph Spanier | 2009-10-27 |
| 7604708 | Cleaning of native oxide with hydrogen-containing radicals | Bingxi Wood, Mark Kawaguchi, James S. Papanu, Roderick C. Mosely, Chiukun Steven Lai +2 more | 2009-10-20 |
| 7573024 | Flexible bioelectronic photodetector and imaging arrays based on bacteriorhodopsin (BR) thin films | George Karl Knopf, Amarjeet Bassi | 2009-08-11 |
| 7520957 | Lid assembly for front end of line fabrication | Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Joel M. Huston +6 more | 2009-04-21 |
| 7480129 | Detachable electrostatic chuck for supporting a substrate in a process chamber | Karl M. Brown, Semyon Sherstinsky, Cheng-Hsiung Tsai, Vineet Haresh Mehta, Allen Lau +1 more | 2009-01-20 |
| 7407565 | Method and apparatus for ionized plasma deposition | James Van Gogh | 2008-08-05 |
| 7396480 | Method for front end of line fabrication | Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Joel M. Huston +6 more | 2008-07-08 |
| 7304586 | On-line web accessed energy meter | Erran Kagan | 2007-12-04 |
| 7244344 | Physical vapor deposition plasma reactor with VHF source power applied through the workpiece | Karl M. Brown, John Pipitone, Vineet Haresh Mehta, Ralf Hofmann, Semyon Sherstinsky | 2007-07-17 |
| 6751563 | Electronic power meter | Joseph Spanier, Erran Kagan | 2004-06-15 |
| 6627056 | Method and apparatus for ionized plasma deposition | James Van Gogh | 2003-09-30 |
| 6461483 | Method and apparatus for performing high pressure physical vapor deposition | Praburam Gopalraja, Bradley O. Stimson, John C. Forster | 2002-10-08 |
| 6143140 | Method and apparatus to improve the side wall and bottom coverage in IMP process by using magnetic field | Keith A. Miller, James Gogh, Praburam Gopalraja | 2000-11-07 |
| 6057223 | Passivated copper conductive layers for microelectronic applications | William A. Lanford, Peijun Ding | 2000-05-02 |
| 5766379 | Passivated copper conductive layers for microelectronic applications and methods of manufacturing same | William A. Lanford, Peijun Ding | 1998-06-16 |