Issued Patents All Time
Showing 76–100 of 109 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10060032 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2018-08-28 |
| 10030306 | PECVD apparatus and process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2018-07-24 |
| 9975320 | Diffusion bonded plasma resisted chemical vapor deposition (CVD) chamber heater | Ren-Guan Duan, Juan Carlos Rocha-Alvarez | 2018-05-22 |
| 9840777 | Apparatus for radical-based deposition of dielectric films | Juan Carlos Rocha-Alvarez, Yihong Chen, Abhijit Basu Mallick, Oscar Lopez, Ningli Liu | 2017-12-12 |
| 9816187 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2017-11-14 |
| 9725806 | Multi-zone pedestal for plasma processing | Xing Lin, Bozhi Yang, Dale R. DuBois, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan | 2017-08-08 |
| 9556507 | Yttria-based material coated chemical vapor deposition chamber heater | Ren-Guan Duan, Juan Carlos Rocha-Alvarez | 2017-01-31 |
| 9537412 | Direct current voltage conversion device and clamping circuit | Peng Qu, Zhihong Ye | 2017-01-03 |
| 9473035 | Power conversion device | Peng Qu, Zhihong Ye | 2016-10-18 |
| 9458537 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2016-10-04 |
| 9450886 | Bandwidth adjustment method, bus controller, and signal convertor | Xueren Yang, Tao Lin, Jiehua Ye | 2016-09-20 |
| 9391862 | Method and apparatus for scheduling a service processing resource | — | 2016-07-12 |
| 9384950 | Chamber coatings | Ren-Guan Duan, Juan Carlos Rocha-Alvarez, Ningli Liu, Yihong Chen, Abhijit Basu Mallick +1 more | 2016-07-05 |
| 9157730 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2015-10-13 |
| 8911553 | Quartz showerhead for nanocure UV chamber | Sanjeev Baluja, Juan Carlos Rocha-Alvarez, Alexandros T. Demos, Thomas Nowak | 2014-12-16 |
| 8884524 | Apparatus and methods for improving reliability of RF grounding | Dale R. Du Bois, Mohamad A. Ayoub, Juan Carlos Rocha-Alvarez | 2014-11-11 |
| 8778813 | Confined process volume PECVD chamber | Ramprakash Sankarakrishnan, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Dale R. Du Bois, Mark Fodor +6 more | 2014-07-15 |
| 8772682 | Methods and apparatus for controlling temperature of a multi-zone heater in a process chamber | Hari Kishore Ambal, Uwe Haller | 2014-07-08 |
| 8666255 | Circuits, architectures, apparatuses, systems, and methods for merging of management and data signals, and for recovery of a management signal | Yuanjun Huang, Yaxi Xiong, Shengzhong Zhang | 2014-03-04 |
| 8629029 | Vertical SOI bipolar junction transistor and manufacturing method thereof | Jing Chen, Jiexin Luo, Qingqing Wu, Xiaolu Huang, Xi Wang | 2014-01-14 |
| 8552346 | Methods and apparatus for controlling temperature of a multi-zone heater in an process chamber | Hari Kishore Ambal, Uwe Haller | 2013-10-08 |
| 8525417 | Discharge electrode array for thin-film solar cell deposition | Zhijian Li, Yi-Qun Li, Zhubing He, Shengming Hu, Chunzhu Wang | 2013-09-03 |
| 8438989 | Surface feed-in electrodes for deposition of thin film solar cell and signal feed-in method thereof | Shengming Hu, Yi-Qun Li, Zhubing He, Zhijian Li, Chunzhu Wang | 2013-05-14 |
| 8291858 | Movable jig for silicon-based thin film solar cell | Shengming Hu, Yi-Qun Li, Zhubing He, Zhijiang Li, Chunzhu Wang | 2012-10-23 |
| 8282734 | Methods to improve the in-film defectivity of PECVD amorphous carbon films | Deenesh Padhi, Chiu Chan, Sudha Rathi, Ganesh Balasubramanian, Karthik Janakiraman +4 more | 2012-10-09 |