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Robot for simultaneous substrate transfer |
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2022-06-07 |
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Dual port remote plasma clean isolation valve |
Benjamin B. Riordon, Aaron P. Webb, Gary Wyka |
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Method and device for a carrier proximity mask |
Morgan Evans, Rutger Meyer Timmerman Thijssen, Ross Bandy, Ryan Magee |
2022-01-25 |
| D938373 |
Substrate transfer structure |
Jason M. Schaller, Benjamin B. Riordon, Mitchell DiSanto, Paul Forderhase, Gary Wyka +7 more |
2021-12-14 |
| 11189460 |
System, apparatus and method for variable length electrode in linear accelerator |
Paul J. Murphy, Frank Sinclair, William Davis Lee |
2021-11-30 |
| 11117265 |
Robot for simultaneous substrate transfer |
Paul Z. Wirth, Jason M. Schaller |
2021-09-14 |
| 11094504 |
Resonator coil having an asymmetrical profile |
Costel Biloiu, Michael Honan, Robert Brent Vopat, David Blahnik, Frank Sinclair +1 more |
2021-08-17 |
| 10991547 |
Method and device for a carrier proximity mask |
Morgan Evans, Rutger Meyer Timmerman Thijssen, Ross Bandy, Ryan Magee |
2021-04-27 |
| 10969029 |
Low particle protected flapper valve |
Tammy Jo Pride, Benjamin B. Riordon, Aaron P. Webb |
2021-04-06 |
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Method and device for a carrier proximity mask |
Morgan Evans, Rutger Meyer Timmerman Thijssen, Ross Bandy |
2021-03-23 |
| 10854483 |
High pressure steam anneal processing apparatus |
Jason M. Schaller, Robert Brent Vopat, Jeffrey Blahnik, Timothy Joseph Franklin, David Blahnik +1 more |
2020-12-01 |
| 10831112 |
Reticle processing system |
James D. Strassner, Robert Brent Vopat, Jeffrey Blahnik |
2020-11-10 |
| 10818525 |
Ambient controlled transfer module and process system |
Shay Assaf, Andrew J. Constant, Jacob Newman, William T. Weaver, Stephen C. Hickerson |
2020-10-27 |
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Annealing system and method |
Jean Delmas, Robert Brent Vopat |
2020-05-05 |
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Transfer chamber and method of using a transfer chamber |
Aaron P. Webb, Paul Forderhase, William T. Weaver, Robert Brent Vopat |
2019-10-15 |
| 10361104 |
Ambient controlled transfer module and process system |
Shay Assaf, Andrew J. Constant, Jacob Newman, William T. Weaver, Stephen C. Hickerson |
2019-07-23 |
| 10256132 |
Reticle processing system |
James D. Strassner, Robert Brent Vopat, Jeffrey Blahnik |
2019-04-09 |
| 10217657 |
Active substrate alignment system and method |
Aaron P. Webb, Timothy J. Miller, Tammy Jo Pride, Christopher N. Grant, James D. Strassner |
2019-02-26 |
| 9694989 |
Workpiece handling system and methods of workpiece handling |
Jason M. Schaller, Robert Brent Vopat, Malcolm N. Daniel, JR., Aaron P. Webb, William T. Weaver |
2017-07-04 |
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Shielding device for substrate edge protection and method of using same |
Aaron P. Webb, William T. Weaver, Timothy J. Miller, James D. Strassner |
2017-05-23 |
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Mask alignment system for semiconductor processing |
Aaron P. Webb, William T. Weaver, Christopher N. Grant |
2017-02-14 |
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Mechanical alignment of substrates to a mask |
Aaron P. Webb, Michael Honan, Luigi G. Amato, Christopher N. Grant, James D. Strassner |
2016-11-08 |
| 9437392 |
High-throughput ion implanter |
William T. Weaver, Joseph C. Olson, James P. Buonodono, Paul Sullivan |
2016-09-06 |
| 9412638 |
End effector pads |
Paul E. Pergande, Krag R. Senior |
2016-08-09 |
| 9333733 |
Multi-part mask for implanting workpieces |
Aaron P. Webb |
2016-05-10 |
