Issued Patents All Time
Showing 51–75 of 78 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9240338 | Workpiece alignment device | Malcolm N. Daniel, JR., William T. Weaver | 2016-01-19 |
| 9145271 | Optimization of conveyor belts used for workpiece processing | Robert Brent Vopat, Malcolm N. Daniel, JR., Luke Bonecutter, Jason M. Schaller, William T. Weaver | 2015-09-29 |
| 9082799 | System and method for 2D workpiece alignment | William T. Weaver, Scott Alan Smith, Michael Beck, Aaron P. Webb, James D. Strassner +2 more | 2015-07-14 |
| 9004564 | Wafer handling apparatus | Paul E. Pergande | 2015-04-14 |
| 8911193 | Substrate processing sequence in a cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, William T. Weaver, Robert B. Lowrance, Eric A. Englhardt +6 more | 2014-12-16 |
| 8813338 | Workpiece alignment device | Malcolm N. Daniel, JR., William T. Weaver | 2014-08-26 |
| 8698104 | System and method for handling multiple workpieces for matrix configuration processing | William T. Weaver, Jaime A. Carrera, Robert Brent Vopat, Aaron P. Webb | 2014-04-15 |
| 8569157 | Stepped masking for patterned implantation | Benjamin B. Riordon, Nicholas P. T. Bateman | 2013-10-29 |
| 8550031 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2013-10-08 |
| 8330128 | Implant mask with moveable hinged mask segments | Robert Brent Vopat, William T. Weaver | 2012-12-11 |
| 8215262 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-07-10 |
| 8181596 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-05-22 |
| 8173527 | Stepped masking for patterned implantation | Benjamin B. Riordon, Nicholas P. T. Bateman | 2012-05-08 |
| 8146530 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-04-03 |
| 8101927 | Masking apparatus for an ion implanter | William T. Weaver | 2012-01-24 |
| 8066466 | Substrate processing sequence in a Cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, William T. Weaver, Robert B. Lowrance, Eric A. Englhardt +6 more | 2011-11-29 |
| 7925377 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2011-04-12 |
| 7819079 | Cartesian cluster tool configuration for lithography type processes | Eric A. Englhardt, Michael R. Rice, Jeffrey C. Hudgens, Steve Hongkham, Jay D. Pinson, II +3 more | 2010-10-26 |
| 7798764 | Substrate processing sequence in a cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, William T. Weaver, Robert B. Lowrance, Eric A. Englhardt +6 more | 2010-09-21 |
| 7743728 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2010-06-29 |
| 7694647 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2010-04-13 |
| 7694688 | Wet clean system design | Paul Lester, Scott Meyer, Wyland L. Atkins, Douglas Richards, Constantin Predoaica +6 more | 2010-04-13 |
| 7651306 | Cartesian robot cluster tool architecture | Mike Rice, Jeffrey C. Hudgens, William T. Weaver, Robert B. Lowrance, Eric A. Englhardt +6 more | 2010-01-26 |
| 7374393 | Method of retaining a substrate during a substrate transferring process | Mike Rice, Jeffrey C. Hudgens, William T. Weaver, Robert B. Lowrance, Eric A. Englhardt +6 more | 2008-05-20 |
| 7374391 | Substrate gripper for a substrate handling robot | Michael R. Rice, Jeffrey C. Hudgens, William T. Weaver, Robert B. Lowrance, Eric A. Englhardt +6 more | 2008-05-20 |