Issued Patents All Time
Showing 76–78 of 78 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7357842 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2008-04-15 |
| 6315878 | Substrate support and lift apparatus and method | Nalin Patadia | 2001-11-13 |
| 6146504 | Substrate support and lift apparatus and method | Nalin Patadia | 2000-11-14 |