Issued Patents All Time
Showing 76–100 of 100 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6623656 | Source reagent composition for CVD formation of Zr/Hf doped gate dielectric and high dielectric constant metal oxide thin films and method of using same | Thomas H. Baum, Chongying Xu, Witold Paw, Bryan C. Hendrix, Ziyun Wang | 2003-09-23 |
| 6599447 | Zirconium-doped BST materials and MOCVD process forming same | Gregory T. Stauf, Philip S. H. Chen | 2003-07-29 |
| 6514835 | Stress control of thin films by mechanical deformation of wafer substrate | Bryan C. Hendrix, Steven M. Bilodeau | 2003-02-04 |
| 6511706 | MOCVD of SBT using tetrahydrofuran-based solvent system for precursor delivery | Bryan C. Hendrix, Thomas H. Baum, Debra A. Desrochers-Christos, Witold Paw | 2003-01-28 |
| 6500489 | Low temperature CVD processes for preparing ferroelectric films using Bi alcoxides | Frank Hintermaier, Peter C. Van Buskirk, Bryan C. Hendrix, Thomas H. Baum, Debra A. Desrochers | 2002-12-31 |
| 6350643 | Reduced degradation of metal oxide ceramic due to diffusion of a mobile specie therefrom | Frank Hintermaier, Bryan C. Hendrix, Debra A. Desrochers, Thomas H. Baum | 2002-02-26 |
| 6340386 | MOCVD of SBT using toluene based solvent system for precursor delivery | Bryan C. Hendrix, Thomas H. Baum, Debra Desrochers Christos | 2002-01-22 |
| 6316797 | Scalable lead zirconium titanate(PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material | Peter C. Van Buskirk, Steven M. Bilodeau, Michael W. Russell, Stephen T. Johnston, Daniel J. Vestyck +1 more | 2001-11-13 |
| 6312816 | A-site- and/or B-site-modified PbZrTiO3 materials and (Pb, Sr, Ca, Ba, Mg) (Zr, Ti, Nb, Ta)O3 films having utility in ferroelectric random access memories and high performance thin film microactuators | Ing-Shin Chen, Steven M. Bilodeau, Thomas H. Baum | 2001-11-06 |
| 6303391 | Low temperature chemical vapor deposition process for forming bismuth-containing ceramic films useful in ferroelectric memory devices | Frank Hintermaier, Christine Dehm, Wolfgang Hoenlein, Peter C. Van Buskirk, Bryan C. Hendrix +2 more | 2001-10-16 |
| 6284654 | Chemical vapor deposition process for fabrication of hybrid electrodes | Thomas H. Baum, Peter C. Van Buskirk | 2001-09-04 |
| 6277436 | Liquid delivery MOCVD process for deposition of high frequency dielectric materials | Gregory T. Stauf, Thomas H. Baum | 2001-08-21 |
| 6204158 | Reduced diffusion of a mobile specie from a metal oxide ceramic into the substrate | Bryan C. Hendrix, Frank Hintermaier, Thomas H. Baum, Debra A. Desrochers | 2001-03-20 |
| 6180420 | Low temperature CVD processes for preparing ferroelectric films using Bi carboxylates | Frank Hintermaier, Peter C. Van Buskirk, Bryan C. Hendrix, Thomas H. Baum, Debra A. Desrochers | 2001-01-30 |
| 6177135 | Low temperature CVD processes for preparing ferroelectric films using Bi amides | Frank Hintermaier, Peter C. Van Buskirk, Bryan C. Hendrix, Thomas H. Baum, Debra A. Desrochers | 2001-01-23 |
| 6156623 | Stress control of thin films by mechanical deformation of wafer substrate | Bryan C. Hendrix, Steven M. Bilodeau | 2000-12-05 |
| 6133051 | Amorphously deposited metal oxide ceramic films | Frank Hintermaier, Bryan C. Hendrix, Debra A. Desrochers, Thomas H. Baum | 2000-10-17 |
| 6030454 | Composition and method for forming thin film ferrite layers on a substrate | Thomas H. Baum | 2000-02-29 |
| 5998236 | Process for controlled orientation of ferroelectric layers | Peter C. Van Buskirk | 1999-12-07 |
| 5932905 | Article comprising a capacitor with non-perovskite Sr-Ba-Ti oxide dielectric thin film | Henry M. O'Bryan, Jr., Gregory T. Stauf, Roderick K. Watts | 1999-08-03 |
| 5876503 | Multiple vaporizer reagent supply system for chemical vapor deposition utilizing dissimilar precursor compositions | Peter C. Van Buskirk | 1999-03-02 |
| 5719417 | Ferroelectric integrated circuit structure | Peter C. Van Buskirk | 1998-02-17 |
| 5629564 | Electroplated solder terminal | Henry A. Nye, III, Ho-Ming Tong, Paul A. Totta | 1997-05-13 |
| 5503286 | Electroplated solder terminal | Henry A. Nye, III, Ho-Ming Tong, Paul A. Totta | 1996-04-02 |
| 5268072 | Etching processes for avoiding edge stress in semiconductor chip solder bumps | Birendra Agarwala, Madhav Datta, Richard E. Gegenwarth, Christopher V. Jahnes, Patrick M. Miller +2 more | 1993-12-07 |