Issued Patents 2019
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514620 | Alignment method | Franciscus Godefridus Casper Bijnen, Vassili Demergis, Edo Maria Hulsebos | 2019-12-24 |
| 10474039 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Paul Christiaan Hinnen, Maikel Robert GOOSEN, Maurits Van Der Schaar, Arie Jeffrey Den Boef | 2019-11-12 |
| 10466601 | Alignment sensor for lithographic apparatus | Alessandro Polo, Patricius Aloysius Jacobus Tinnemans, Scott Coston, Ronan James Havelin | 2019-11-05 |
| 10451559 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Peter Danny Van Voorst, Nan Lin, Sander Bas Roobol, Sietse Thijmen Van Der Post | 2019-10-22 |
| 10451978 | Metrology parameter determination and metrology recipe selection | Kaustuve Bhattacharyya, Marc Johannes Noot, Arie Jeffrey Den Boef, Mohammadreza Hajiahmadi, Farzad Farhadzadeh | 2019-10-22 |
| 10416577 | Position measuring method of an alignment target | Ralph Brinkhof, Maikel Robert GOOSEN, Vassili Demergis, Bartolomeus Petrus Rijpers | 2019-09-17 |
| 10386735 | Lithographic apparatus alignment sensor and method | Arie Jeffrey Den Boef, Nitesh Pandey, Patricius Aloysius Jacobus Tinnemans, Stefan Michiel Witte, Kjeld Sijbrand Eduard Eikema | 2019-08-20 |
| 10379448 | Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus | Sander Bas Roobol, Nan Lin, Willem Marie Julia Marcel Coene, Arie Jeffrey Den Boef | 2019-08-13 |
| 10330606 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Peter Danny Van Voorst, Nan Lin, Sander Bas Roobol, Sietse Thijmen Van Der Post | 2019-06-25 |
| 10267744 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Patricius Aloysius Jacobus Tinnemans, Nan Lin, Sander Bas Roobol | 2019-04-23 |
| 10234771 | HHG source, inspection apparatus and method for performing a measurement | Nan Lin, Arie Jeffrey Den Boef, Sander Bas Roobol, Niels Geypen | 2019-03-19 |