Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514620 | Alignment method | Simon Gijsbert Josephus Mathijssen, Vassili Demergis, Edo Maria Hulsebos | 2019-12-24 |
| 10474045 | Lithographic apparatus and device manufacturing method | Arie Jeffrey Den Boef, Richard Johannes Franciscus Van Haren, Patricius Aloysius Jacobus Tinnemans, Alexander Ypma, Irina Lyulina +6 more | 2019-11-12 |
| 10444647 | Methods and apparatus for determining the position of a target structure on a substrate, methods and apparatus for determining the position of a substrate | Augustinus Hubert Maria Boshouwers, Johannes Onvlee | 2019-10-15 |
| 10331040 | Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Edo Maria Hulsebos, Patricius Aloysius Jacobus Tinnemans, Ralph Brinkhof, Pieter Jacob Heres, Jorn Kjeld Lucas +2 more | 2019-06-25 |