Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10416577 | Position measuring method of an alignment target | Simon Gijsbert Josephus Mathijssen, Maikel Robert GOOSEN, Vassili Demergis, Bartolomeus Petrus Rijpers | 2019-09-17 |
| 10331040 | Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Edo Maria Hulsebos, Patricius Aloysius Jacobus Tinnemans, Pieter Jacob Heres, Jorn Kjeld Lucas, Loek Johannes Petrus Verhees +2 more | 2019-06-25 |