| 10474045 |
Lithographic apparatus and device manufacturing method |
Franciscus Godefridus Casper Bijnen, Arie Jeffrey Den Boef, Richard Johannes Franciscus Van Haren, Alexander Ypma, Irina Lyulina +6 more |
2019-11-12 |
| 10466601 |
Alignment sensor for lithographic apparatus |
Alessandro Polo, Simon Gijsbert Josephus Mathijssen, Scott Coston, Ronan James Havelin |
2019-11-05 |
| 10386735 |
Lithographic apparatus alignment sensor and method |
Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Nitesh Pandey, Stefan Michiel Witte, Kjeld Sijbrand Eduard Eikema |
2019-08-20 |
| 10346729 |
Apparatus and method for converting a vector-based representation of a desired device pattern for a lithography apparatus, apparatus and method for providing data to a programmable patterning device, a lithography apparatus and a device manufacturing method |
Marcel Bontekoe, Patrick Petrus Albertus Arnoldino Peeters |
2019-07-09 |
| 10331040 |
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus |
Edo Maria Hulsebos, Ralph Brinkhof, Pieter Jacob Heres, Jorn Kjeld Lucas, Loek Johannes Petrus Verhees +2 more |
2019-06-25 |
| 10267744 |
Illumination source for an inspection apparatus, inspection apparatus and inspection method |
Nan Lin, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen |
2019-04-23 |
| 10261423 |
Lithographic method and apparatus |
Lense Hendrik-Jan Maria Swaenen, Johannes Jacobus Matheus Baselmans, Bogathi Vishnu Vardhana Reddy, Beeri Nativ |
2019-04-16 |
| 10254663 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more |
2019-04-09 |
| 10248034 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more |
2019-04-02 |
| 10248033 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more |
2019-04-02 |
| 10241426 |
Lithographic apparatus and device manufacturing method |
— |
2019-03-26 |
| 10222703 |
Lithographic apparatus and method |
Heine Melle Mulder, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Van Greevenbroek +2 more |
2019-03-05 |