Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495889 | Beam homogenizer, illumination system and metrology system | Armand Eugene Albert Koolen, Teunis Willem Tukker, Johannes Matheus Marie De Wit, Stanislav Smirnov | 2019-12-03 |
| 10289006 | Beam delivery for EUV lithography | Jan Bernard Plechelmus Van Schoot, Hermanus Johannes Maria Kreuwel | 2019-05-14 |
| 10222702 | Radiation source | Arno Jan Bleeker, Ramon Mark Hofstra, Erik Petrus Buurman, Johannes Hubertus Josephina Moors, Alexander Matthijs Struycken +3 more | 2019-03-05 |
| 10222703 | Lithographic apparatus and method | Heine Melle Mulder, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Hendrikus Robertus Marie Van Greevenbroek, Paul Van Der Veen +2 more | 2019-03-05 |