Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495889 | Beam homogenizer, illumination system and metrology system | Markus Franciscus Antonius Eurlings, Armand Eugene Albert Koolen, Johannes Matheus Marie De Wit, Stanislav Smirnov | 2019-12-03 |
| 10437159 | Measurement system, lithographic system, and method of measuring a target | Gerbrand Van Der Zouw, Amandev Singh | 2019-10-08 |
| 10303064 | Radiation conditioning system, illumination system and metrology apparatus, device manufacturing method | Sebastianus Adrianus GOORDEN, Johannes Matheus Marie De Wit, Jonas Mertes, Gerbrand Van Der Zouw | 2019-05-28 |
| 10234767 | Device and method for processing a radiation beam with coherence | Sebastianus Adrianus GOORDEN, Nitesh Pandey, Duygu Akbulut, Johannes Matheus Marie De Wit | 2019-03-19 |
| 10180630 | Illumination system for a lithographic or inspection apparatus | Nitesh Pandey, Coen Adrianus Verschuren | 2019-01-15 |