Issued Patents 2019
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10444640 | Metrology apparatus, lithographic system, and method of measuring a structure | Janneke Ravensbergen, Duygu Akbulut, Jin LIAN | 2019-10-15 |
| 10444638 | Method for parameter determination and apparatus thereof | Maxim PISARENCO, Alessandro Polo | 2019-10-15 |
| 10423077 | Metrology method and apparatus, computer program and lithographic system | Zili Zhou, Armand Eugene Albert Koolen, Gerbrand Van Der Zouw | 2019-09-24 |
| 10393514 | Topography measurement system | — | 2019-08-27 |
| 10394143 | Topography measurement system | Arie Jeffrey Den Boef, Heine Melle Mulder, Willem Richard Pongers, Paulus Antonius Andreas Teunissen | 2019-08-27 |
| 10386735 | Lithographic apparatus alignment sensor and method | Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Patricius Aloysius Jacobus Tinnemans, Stefan Michiel Witte, Kjeld Sijbrand Eduard Eikema | 2019-08-20 |
| 10365565 | Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use therein | Arie Jeffrey Den Boef, Marinus Johannes Maria Van Dam | 2019-07-30 |
| 10353298 | Method of measuring a target, metrology apparatus, polarizer assembly | Zili Zhou | 2019-07-16 |
| 10310389 | Method of measuring, device manufacturing method, metrology apparatus, and lithographic system | Jin LIAN, Samee Ur Rehman, Martin Jacobus Johan Jak | 2019-06-04 |
| 10234767 | Device and method for processing a radiation beam with coherence | Sebastianus Adrianus GOORDEN, Duygu Akbulut, Teunis Willem Tukker, Johannes Matheus Marie De Wit | 2019-03-19 |
| 10191391 | Metrology method and apparatus, computer program and lithographic system | Zili Zhou, Armand Eugene Albert Koolen, Gerbrand Van Der Zouw | 2019-01-29 |
| 10180630 | Illumination system for a lithographic or inspection apparatus | Teunis Willem Tukker, Coen Adrianus Verschuren | 2019-01-15 |