Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488765 | Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus | Johan Maria Van Boxmeer, Koos Van Berkel, Sietse Thijmen Van Der Post, Johannes Hubertus Antonius Van De Rijdt | 2019-11-26 |
| 10365565 | Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use therein | Nitesh Pandey, Arie Jeffrey Den Boef | 2019-07-30 |