Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488765 | Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus | Johan Maria Van Boxmeer, Marinus Johannes Maria Van Dam, Sietse Thijmen Van Der Post, Johannes Hubertus Antonius Van De Rijdt | 2019-11-26 |
| 10185224 | Method and apparatus for inspection and metrology | Ferry Zijp, Duygu Akbulut, Peter Danny Van Voorst, Jeroen Johan Maarten Van De Wijdeven | 2019-01-22 |