Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488765 | Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus | Johan Maria Van Boxmeer, Marinus Johannes Maria Van Dam, Koos Van Berkel, Johannes Hubertus Antonius Van De Rijdt | 2019-11-26 |
| 10451559 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Peter Danny Van Voorst, Nan Lin, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen | 2019-10-22 |
| 10330606 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Peter Danny Van Voorst, Nan Lin, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen | 2019-06-25 |
| 10248029 | Method and apparatus for inspection and metrology | Ferry Zijp, Sander Bas Roobol | 2019-04-02 |