Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10444640 | Metrology apparatus, lithographic system, and method of measuring a structure | Janneke Ravensbergen, Nitesh Pandey, Jin LIAN | 2019-10-15 |
| 10317808 | Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing method | Simon Reinald HUISMAN, Alessandro Polo, Sebastianus Adrianus GOORDEN, Arie Jeffrey Den Boef | 2019-06-11 |
| 10234767 | Device and method for processing a radiation beam with coherence | Sebastianus Adrianus GOORDEN, Nitesh Pandey, Teunis Willem Tukker, Johannes Matheus Marie De Wit | 2019-03-19 |
| 10185224 | Method and apparatus for inspection and metrology | Ferry Zijp, Peter Danny Van Voorst, Jeroen Johan Maarten Van De Wijdeven, Koos Van Berkel | 2019-01-22 |