Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10317808 | Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing method | Simon Reinald HUISMAN, Alessandro Polo, Duygu Akbulut, Arie Jeffrey Den Boef | 2019-06-11 |
| 10303064 | Radiation conditioning system, illumination system and metrology apparatus, device manufacturing method | Teunis Willem Tukker, Johannes Matheus Marie De Wit, Jonas Mertes, Gerbrand Van Der Zouw | 2019-05-28 |
| 10234767 | Device and method for processing a radiation beam with coherence | Nitesh Pandey, Duygu Akbulut, Teunis Willem Tukker, Johannes Matheus Marie De Wit | 2019-03-19 |