Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10466601 | Alignment sensor for lithographic apparatus | Simon Gijsbert Josephus Mathijssen, Patricius Aloysius Jacobus Tinnemans, Scott Coston, Ronan James Havelin | 2019-11-05 |
| 10444638 | Method for parameter determination and apparatus thereof | Nitesh Pandey, Maxim PISARENCO | 2019-10-15 |
| 10317808 | Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing method | Simon Reinald HUISMAN, Duygu Akbulut, Sebastianus Adrianus GOORDEN, Arie Jeffrey Den Boef | 2019-06-11 |