Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10466601 | Alignment sensor for lithographic apparatus | Alessandro Polo, Simon Gijsbert Josephus Mathijssen, Patricius Aloysius Jacobus Tinnemans, Ronan James Havelin | 2019-11-05 |