Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495889 | Beam homogenizer, illumination system and metrology system | Markus Franciscus Antonius Eurlings, Armand Eugene Albert Koolen, Teunis Willem Tukker, Stanislav Smirnov | 2019-12-03 |
| 10416567 | Illumination system and metrology system | Kim Gerard Feijen, Anko Jozef Cornelus Sijben, Martinus Gerardus Johannes Maria MAASSEN, Henricus Martinus Johannes Van De Groes | 2019-09-17 |
| 10303064 | Radiation conditioning system, illumination system and metrology apparatus, device manufacturing method | Sebastianus Adrianus GOORDEN, Teunis Willem Tukker, Jonas Mertes, Gerbrand Van Der Zouw | 2019-05-28 |
| 10234767 | Device and method for processing a radiation beam with coherence | Sebastianus Adrianus GOORDEN, Nitesh Pandey, Duygu Akbulut, Teunis Willem Tukker | 2019-03-19 |